JPH01172049U - - Google Patents
Info
- Publication number
- JPH01172049U JPH01172049U JP6868488U JP6868488U JPH01172049U JP H01172049 U JPH01172049 U JP H01172049U JP 6868488 U JP6868488 U JP 6868488U JP 6868488 U JP6868488 U JP 6868488U JP H01172049 U JPH01172049 U JP H01172049U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- spin
- heater
- temperature
- spin stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005611 electricity Effects 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6868488U JPH01172049U (en]) | 1988-05-26 | 1988-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6868488U JPH01172049U (en]) | 1988-05-26 | 1988-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01172049U true JPH01172049U (en]) | 1989-12-06 |
Family
ID=31293988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6868488U Pending JPH01172049U (en]) | 1988-05-26 | 1988-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01172049U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003117470A (ja) * | 2001-10-16 | 2003-04-22 | Semiconductor Leading Edge Technologies Inc | 回転式薄膜形成装置及び薄膜形成方法 |
-
1988
- 1988-05-26 JP JP6868488U patent/JPH01172049U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003117470A (ja) * | 2001-10-16 | 2003-04-22 | Semiconductor Leading Edge Technologies Inc | 回転式薄膜形成装置及び薄膜形成方法 |